NST 1200C Three Zones CVD Tube Furnace

Description

TECHNICAL PARAMETER

NST 1200C Three Zones CVD Tube Furnace with High Vacuum Station (1.0E-5 torr) + 4 Channel MFC Gas Station

This is a video link to our product.

https://www.youtube.com/watch?v=FzLjvMXq1pY&t=37s

The TMAX-3-1200 series furnace workstation consists of three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protection.The furnace comes with a 4-channel digital LED display mas flow gas control station.

Specifications

tube furnace	Casing	Double layer steel casing with air cooling. Built-in thermostat to control Cooling running automatically when case > 55°C.
	Processing Tube	Material: Fused quartz tube
	Thermal Block Placement
	Power	7KW
	Rated Voltage	AC 208-240V Single phase, 50/60Hz
	Heating Element	Fe-Cr-Al Alloy doped by Mo
	Working Temp.	Max. Heating Temp.: 1200°C Continuous Working Temp.: 1100°C
	Heat-up Rate	Heat-up rate: 1~20°C/min programmable
	Heating Zone Length	Total heating zone: 900mm   (300mm + 300mm + 300mm)
	Temp. Controller	Three precision temperature controllers to control three zones separately. PID automatic control with 30 steps programmable segments. Temperature accuracy: ±1°C Thermocouple: K type built inside the furnace
	Vacuum Seal	One pair of stainless steel vacuum flange with: – one mechanical pressure gauge – two needle valves  – one KF-40 connector for the high vacuum station.
	Rated Voltage	AC 208-240V Single Phase, 50/60Hz
	Dimension	1100(L) x 450(W) x 670(H), mm
High Vacuum Station	Structure	Mobile cart size:  600 (L) x 600 (W) x 700(H), mm Max. Loading:       600 Lbs on top Molecular pump control Panel :   LCD digital Inside:   Pfeiffer vacuum pump  made in Germany Vacuum sensor is included
	Volume Flow Rate	Nitrogen   N2     33 L/s Helium     He     39 L/s   (2340L/minute) Hydrogen H2   32 L/s
	Working Range	From 1000 mbar to <1E-7 mbar
	Ultimate Pressure	<1E-8 mbar (without any leaking )
	Voltage & Power	110VAC or 220VAC, 110W
Mass Flow Gas Control	Structure	2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software LED display 4 channel MFC Made of 316 stainless steel with gas flow range as below: Controller 1: 0~100SCCM Controller 2: 1~199 SCCM Controller 3: 1~199 SCCM Controller 4: 1~499 SCCM 4 Channel gas go through a Gas mixing tank: Φ80X120mm Dimension: 600(L) x 745(W) x 700(H), mm
	Power	18W
	Rated Voltage	AC 208-240V, Single phase, 50/60Hz

Shipping & Warranty

Shipping Dimension	Total Three Pallets   （ #1: 60″ x 45″ x 40″    #2: 48″ x 40″ x 42″  #3: 48″ x 40″ x 42″ ）
Shipping Weight	850 lbs
Warranty	One year limited warranty  (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty,  please order the replacement at related products below.)
Compliance	CE Certified All electric components ( >24V) are UL / MET / CSA certified The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. (please click marks