NST 1500°C Max Tube Furnace (50mm OD)

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Description

1500°C Max Tube Furnace (50mm OD) with Sliding Flanges for Fast Heating/Cooling

TMAX-1500X-RTP50 is a CE certified slideable tube furnace that utilizes 50 mm OD x 44mm ID x304.8 mm (12″) L  mullite or quartz tubes (one end closed). The maximum working temperature of this furnace is 1500ºC.  A sliding rail is installed on right side of the flange for manually moving it from one side to the other, which allows it to achieve fast heating and cooling up to 1500 oC.  For the fastest heating, you can insert a mullite processing tube into the pre-heated furnace at the desired temperature. For the fast cooling, you can remove the tube from the hot furnace chamber and use forced air cooling. The heating and cooling rates can be much higher under vacuum or inert gasses. It is an ideal furnace for rapid thermal processing at the lowest cost.

SPECIFICATIONS

Furnace Structure
  • One sliding flange is installed on right side furnace,

which can move processing tube in & out easily.

  • Vacuum flanges can reach 10E-5 torr by molecular pump or

10E-3 torr by a mechanical pump.  The flange has a 1/4″

Dia. the thermal couple built in for monitoring real-time

temperature inside the tube.

  • Digital vacuum gauge is installed the flange
  • RS485 port included for computerized control
Power 2.5KW ( 20A breaker required)
Voltage AC 208-240V Single Phase, 50/60 Hz
Max. Temperature 1500  oC
Continuous Temperature 1400  oC
Temperature Accuracy +/ – 1 °C
Heating Zone Length  6″ (152 mm)
Constant Temperature Zone 100 mm (+/-1oC) @ 800 – 1500 oC
Heating Elements SiC rod (1500C grade) , 4 pcs
Thermocouples Two S type thermal couples are included. One S type 5″

Length is built in furnace to control furnace temperature

And another S type 14″  inserted inside tube to monitor sample

real temperature profile (below right)

 

Temperature Controllers
  • Two digital temperature controllers with 30

programmable segments are built in. One control furnace temperature

and another monitor temperature of the sample inside processing tube.

  • Built-in over temperature alarm and protection allows

for operation without an attendant.

  • +/- 1 ºC temperature accuracy.
Heating & Cooling Rate

Temp vs Time curve
(Mullite tube)

Temp Vs Time curve
(Quartz tube)

For Mullite Tube:

Heating speed:

10°C/sec   (RT – 800°C);

7°C/sec    (800°C – 1000°C);

4°C/sec    (1000°C – 1100°C);

3°C/sec    (1100°C – 1200°C);

1.5°C/sec (1200°C – 1300°C);

0.7°C/sec (1300°C – 1350°C)

Cooling speed:

14°C/sec    (1350°C – 1000°C);

7°C/sec      (1000°C – 800°C);

5°C/sec      (800°C – 600°C);

3.76°C/sec (600°C – 500°C);

2.5°C/sec   (500°C – 400°C);

1.36°C/sec  (400°C – 300°C)

For Quartz Tube:

Heating speed:

30°C/sec (RT – 500°C);

12°C/sec (500°C – 800°C);

5°C/sec (800°C – 900°C);

3.6°C/sec (900°C – 1000°C);

1°C/sec (1000°C – 1100°C);

Cooling speed:

16°C/sec (1100°C – 800°C);

9°C/sec (800°C – 600°C);

5°C/sec (600°C – 500°C);

3.6°C/sec (500°C – 400°C);

2.5°C/sec (400°C – 300°C);

Processing Tube Size

(one mullite tube and one quartz tube are included in the standard package)

Oneend Closed  mullite tube made in the USA

Size:  OD: 50mm x ID 44mm  x 304.8mm L
Max. Working Temp. 1500oC in air

Max. Temp. 1300oC in vacuum

One end closed quartz tube

Size: OD: 50mm x ID 44mm x 304.8mm L
Max. Working Temp. 1200oC inair

Max. Temp. 1000oC in vacuum

Warning:  Processing tube is consumable and easy to broken

during RTP, not covered by warranty.  Pls click pic above to order spare

Sliding Flange
  • Double sliding rail made by Cr-plated steel
  • Sliding length: 350 mm
Vacuum Seal & Digital Vacuum Gauge
  • One stainless steel flanges with 1/4″Dia fitting for insect

thermal couple is included

  • One digital vacuum gauge and valves are included for

immediate use.

  • OPTIONAL: A gas-type independent (above 10mbar)

digital vacuum gauge with a wide range between 3.8×10-5

to 1125 Torr. Aside from greater measurement precision,

this gauge reduces risks of chamber explosions caused

by the incorrect reading of gas pressures due to gas-type

dependency.

 

Vacuum Level
  • Limited by the pump. ( pump is not included )
    • 10E-5 torr can be reached by molecular pump
    • 10E-2 torr by a mechanical pump.

 

Dimensions 400L  x 305W x 530H mm (15.7″ x 12″ x 21″)
Net Weight ~ 45 Kg
Shipping Package Size 47″x31″x40″
Shipping Weight 150 lbs
Warranty One year limited manufacturer’s warranty with lifetime support

(Consumable parts such as furnace liner, processing tubes,

heating elements, and O-rings are not covered by the warranty,

please order replacements at related products below.)

Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and
  • Microsoft Office 2013 (30 days free trial) for immediate use.

Labview Based Temperature Control System enables

  • user to edit temperature profile, manage heat-treatment

recipe, record and plot data for MTI furnaces.

  • A wireless remote control provides up to 300 meters

operating range.

  • Above features are available upon request at an extra

cost (up to $1,000). Please contact us for more information.

  • Note:
    The software is only compatible with MTI’s Yudian

Temperature Controller

    

Compliance
  • CE Certified
  • UL / MET / CSA Certification is available upon request,

additional charges will apply

  • Temperature controller is MET and CE Certified
  • Transformer is UL Certified

 

Warning:
  • To get the fast heating performance, first keep the tube

out of the chamber meanwhile, preheat the chamber to

the required temperature. Then insert the tube into the

chamber to get fast heat. Please watch the demo video

below to see how this is done.

  • The tube furnaces with processing tube are designed for
  • using under vacuum and low pressure < 0.02 MPa / 0.2 Bar/

3 PSI.Vacuum limit definition for all mullite tube

furnaces: * Vacuum pressures may only be safely used up

to 1300°C

  • Attention: A two-stage pressure regulator must be

installed on the gas cylinder to limit the pressure to

below 3 PSI for safe operation.

  • Never heat the furnace while the gas release valve is

closed and a positive pressure condition exists within the

furnace chamber. The pressure gauge must be used to

closely monitor the chamber condition at all times during

the heating process; please open the gas release valve

immediately once the chamber pressure has reached over

3 PSI to prevent unforeseeable damages.

  • The flow rate for gasses should be limited to < 200 SCCM

( or 200ml/min )

  • NOTE The mullite tube shall be considered as a consumable

part. We strongly recommend user keep spare tubes in

order to ensure the continuity of operation. The tube is

not covered by Warranty. Use the link to order more.

  • Please wear protective gears, such as heat resistant

suit & gloves, if you intend to retract the tube from

the heating chamber.

DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!

Application note You may modify the RTP furnace into a small RTE

( rapid thermal evaporation ) or HPCV ( hybrid physical & chemical

vapor deposition ) by DIY.

Attention Notes Performance degradation (i.e. furnace can not reach the maximum

temperature 1500°C or it is drawing a higher than normal

working current) can be expected due to the use of aged

SiC heating elements. It is necessary to replace all the heating

elements if the above symptoms were seen.

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