NST-3 heads compact RF plasma magnetron sputtering coater
NST 3 heads compact RF plasma magnetron sputtering coater is designed for non-metallic thin film coating, mainly for multilayer oxide thin films.DC magnetron sputtering option is available upon request for metallic film deposition, enabling three DC, one RF/two DC, and two RF/one DC sputtering head configurations.
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NST 3 heads compact RF plasma magnetron sputtering coater is mainly used to make non-conductive films, especially some oxide films.It is the most cost-effective coater for researching in the new generation of oxide thin films.
NST 3 heads compact RF plasma magnetron sputtering coater specifications:
|Magnetron Sputtering Head||
|Size||540 mm L×540 mm W×1000 mm H|
|Net Weight||60 kg|
|Warranty||One years limited warranty with lifetime support.|