NST-3″ two zones CSS furnace for rapid thermal processing
NST-3″ two zones CSS furnace is a two heating zone rapid thermal processing furnace with 11″ O.D quartz tube. It is designed for PVD or CSS (Close Spaced Sublimation) film coating up to 3″ diameter or 2″×2″ square.
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NST-3″ two zones CSS furnace is heated by two group of halogen heaters (Top and Bottom) separately with max. 20ºC/s heating rate. Two 30 segment precision temperature controllers are built in with +/-1ºC accuracy. RS485 port and control software are included to allow for the operation of furnace and temperature profile logging via PC. It is excellent tool to research new generation thin film for solar cells, such as CdTe, Sulfide, and Perovskite solar cell.
3″ two zones CSS furnace for rapid thermal processing specifications:
|Furnace structure & Vacuum Chamber||
|Gas Flow Meters||Two float-meters are installed on the control panel with measurement range of:
|Heater and Sample Holder||
|Heating & Cooling Rate||
|Thermal Couple||Two K-type thermal couples (exposed) are installed on top and bottom heaters separately|
|Working Voltage||208 – 240VAC, single phase, 20A air breaker|
|Power Requirement||2200W total ( 1100W for each heater )|
|Warranty||One year limited with lifetime support (Consumable parts such as quartz tube and heating lamps are not covered by the warranty)|