NST-Lab plasma surface treatment instrument
Lab plasma surface treatment instrument combines atmospheric plasma beam together with two dimensions automatic working stage, which allows plasma beam to scan sample surface according to program setting and surface coating or treatment consistent and uniform.
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Lab plasma surface treatment instrument consists of RF generator, flexible gas delivery pipe, plasma beam head, the X-Y working stage with vacuum chuck sample holder and programmable control box.The plasma beam can activate and clean material surface rapidly at low temperature without vacuum, such as single crystal wafer, optical component, plastics etc, and also it can make plasma enhanced CVD film on the substrate via mixture chemical gas under atmospheric pressure.
Lab plasma surface treatment instrument specification:
|Input Power for Plasma||208 V – 240VAC, 50/60 Hz, < 1000W|
|RF Generator||Output Frequency: 20-23kHz,25KV
Plasma Beam Head: Two plasma beam heads are included: Round head: 10-12mm; Rectangular head: 15-18mm
|Input Gas Pressure and Working Gases||
|Plasma Working Pressure||7- 10 PSI|
|Sample Stage & Controller||
|Dimensions & Net Weight||
|Warranty & Certificate||