NST Small high vacuum two-in-one film coater

NST Small high vacuum two-in-one film coater

1.00

The plasma sputtering and evaporating two-in-one film coater is equipped with DC sputtering target and thermal evaporation assembly, which can be used not only for plasma sputtering, but also obtain carbon or other metal simple films by evaporation.

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Description

TECHNICAL PARAMETER

NST The plasma sputtering and evaporating two-in-one film coater is equipped with DC sputtering target and thermal evaporation assembly, which can be used not only for plasma sputtering, but also obtain carbon or other metal simple films by evaporation. In order to improve the coating quality, this two-in-one film coater adopts stainless steel vacuum chamber with high vacuum design of precision molecular pump, high vacuum degree can effectively improve the purity and uniformity of coating, which is conducive to get better experimental results. The sample stage has the function of rotation and heating, which can improve the film adhesion and film uniformity. The instrument is small in size, saves space, and can be placed on the test bench. It is very suitable for universities and research institutions.

Small high vacuum two-in-one film coater applications:

Scanning electron microscope sample surface gold spraying, steaming gold, carbon spraying and other operations, as well as the preparation of non-conductor material test electrodes.

Small high vacuum two-in-one film coater technical parameters:

Small high vacuum two-in-one film coater
Sample stage Size φ138mm Temperature accuracy ±1℃
Heating temperature Max 500℃ Rotary speed 1-20rpm adjustable
DC sputtering head Quantity 2” ×1
Evaporation  system Evaporation source Tungsten wire basket Max temperature 1700℃
Thermocouple S type   thermocouple
Vacuum chamber Chamber size φ170mm × 200mm Observation Window Quartz observation window φ70
Chamber material Stainless steel Opening way Top cover open
Vacuum system Model NST-GZK103-A Pumping interface KF40
Molecular pump NST-600 Exhaust interface KF16
Backing pump Rotary vane pump Vacuum measurement Compound vacuum gauge
Ultimate vacuum 1.0E-5Pa
Pumping rate Molecular pump: 600L/S rotary

Rotary vane pump: 1.1L/S

comprehensive pumping performance: 20 minutes vacuum up to: 1.0E-3pa

Sputter power configuration Quantity DC power supply×1 Max output power 150w
Other parameters Supply voltage AC220V,50Hz Dimensions 600mm×300mm×470mm
Total power 1.5kw Total weight 40kg

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