NST Vacuum magnetron sputtering system

NST Vacuum magnetron sputtering system

1.00

NST Vacuum magnetron sputtering system is mainly composed of sputtering vacuum chamber, permanent magnet magnetron sputtering target (three targets), single substrate heating platform, dc power supply, radio frequency power supply, working air path, air extraction system, vacuum measurement, electronic control system and installation platform.

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Description

TECHNICAL PARAMETER

NST Vacuum magnetron sputtering system is used for the preparation of novel thin film materials such as nanometer single-layer and multi-layer functional film, hard film, metal film, semiconductor film and dielectric film. It can be widely used in the research and production of thin film materials in colleges and universities.

Vacuum magnetron sputtering system specifications:

Vacuum chamber Cylindrical   front opening structure, size Ø450×40mm
Vacuum system configuraition Compound   molecular pump, mechanical pump, pneumatic gate valve, imported SMC cylinder   throttle valve
Ultimate pressure ≤6.6*10-6 Pa(after   baking and degassing)
Vacuum recovery system It can reach   6.6×10-4pa in 25 minutes(start pumping after short exposure to air and filled   with dry helium)
Magnetron target unit Three sets of   permanent magnetic target; target sizeØ60mm(one of those can be used for   sputtering ferromagnetism materials );Each   target rf sputtering is compatible with dc sputtering.Water cooling within   the target; The sample centers of the three targets can fold upward together.   The distance between target and sample is adjustable from 90 to 130mm. Each   target is equipped with imported SMC rotary pneumatic baffle
Single substrate heating table Sample size Ø4 inches
Mode of motion Substrate   rotates continuously, rotation speed 0-30 rpm
Heating Heated by   imported heating wire, max heating temperature 600℃±1℃
Battle format Imported SMC   angle air cylinder control
Gas circuit   system 2-circuit mass   flow controller
Computer control system Fully   automated control by PLC+IPC+touch screen
Optional  accessories Film thickness gauge, air pump, cooling water circulator
Space   occupied Main unit 1000×1800mm2
Electric cabinet 900×600mm2

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